Small Vacuum Systems



1. Mechanical Booster Pumping Systems (VM Series)
Model
Exhaust system
Ultimate Pressure
Features
Main pump
Backing pump
Pa
Mechanical Booster pump
(833L/min)
Oil rotary
pump
(200L/min)
4.0×10-2
Small-sized high-vacuum exhaust equipment integrating a mechanical booster pump, backing pump and piping into one body. Ideal for experiments requiring easy handling and maintenance.


2. High Vacuum Pumping Systems (VPC Series)

Model
Exhaust system
Ultimate Pressure
Features
Main pump
Backing pump
Pa
Oil diffusion pump
(50L/sec)
Oil rotary
pump
(20L/min)
7.0×10-4
Small-sized high-vacuum low cost exhaust equipment that must be stored compactly, such as oil diffusion pumps, oil rotary vacuum pumps, valve piping, electrical systems and pressure measurement ports in pipe frames. Ideal for experiments requiring easy handling and maintenance.
VPC-250F
Oil diffusion pump
(200L/sec)
Oil rotary
pump
(100L/min)
10-4 order


3. High Vacuum Pumping Systems (DEPOX Series)
Model
Exhaust system
Ultimate Pressure
Features
Main pump
Backing pump
Pa
Oil diffusion pump
(200L/sec)
Oil rotary
pump
(100L/min)
10-4 order
Small-sized high-vacuum low cost exhaust equipment that must be stored compactly, such as main pumps, backing pumps, valve piping, electrical systems and pressure measurement ports in stands. Four different types of exhaust system components are provided in the DEPOX series. Ideal for experiments requiring easy handling.
Oil diffusion pump
(400L/sec)
Oil rotary
pump
(200L/min)
10-4 order
Turbo
molecular
pump
(345L/sec)
Oil rotary
pump
(200L/min)
10-4 order
Turbo
molecular
pump
(345L/sec)
Scroll
pump
(250L/min)
10-4 order


4. Vacuum Coater (VPC Series)
Model
Exhaust system
Ultimate Pressure
Features
Main pump
Backing pump
Pa
Oil diffusion pump
(200L/sec)
Oil rotary
pump
(100L/min)
1.3×10-3
<VPC-260>
Small-sized high-vacuum low cost exhaust equipment with resistance heating requiring compact storage, such as main pumps, backing pumps, valve piping, electrical systems and pressure measurement ports in pipe frames. Ideal for experiments, such as basic research and development of small boards.
<VPC-1100>
High-speed vacuum evaporation equipment with resistance heating equipped with a bell jar elevating device requiring compact storage, such as oil diffusion pumps, oil rotary vacuum pumps, Pirani vacuum gauges, valve piping, electrical systems and pressure measurement ports in stands. Ideal for experiments, such as basic research and development of large boards.
VPC-1100
Oil diffusion pump
(1100L/sec)
Oil rotary
pump
(200L/min×2)
4.0×10-4
For those of you who are looking for a bigger system than our products,
please check the product of ULVAC, Inc..

5. Vacuum Coater (DEPOX Series)
Model
Exhaust system
Ultimate Pressure
Features
Main pump
Backing pump
Pa
Oil diffusion pump
(200L/sec)
Oil rotary
pump
(100L/min)
8.0×10-4
Small-sized vacuum evaporation equipment with resistance heating requiring compact storage, such as main pumps, backing pumps, Pirani vacuum gauges, ionization vacuum gauges, valve piping, and electrical systems in stands. Four different types of exhaust system components are provided in the DEPOX series. Ideal for experiments, such as basic research and development requiring easy handling.
VWR-400M/ERH
Oil diffusion pump
(400L/sec)
Oil rotary
pump
(200L/min)
4.0×10-4
Turbo
molecular
pump
(345L/sec)
Oil rotary
pump
(200L/min)
4.0×10-4
VTS-350M/ERH
Turbo
molecular
pump
(345L/sec)
Scroll
pump
(250L/min)
4.0×10-4


6. Sputtering Systems (RFS/SCOTT Series)
Model
Exhaust system
Ultimate Pressure
Features
Main pump
Backing pump
Pa
Oil diffusion pump
(150L/sec)
Oil rotary
pump
(100L/min)
6.6×10-4
Small-sized high-frequency sputtering device with an RF power supply. Ideal for basic research and development experiments because of the deposition capabilities for metal, semiconductors and insulators.
VTR-151M/SRF
Turbo
molecular
pump
(230L/sec)
Oil rotary
pump
(200L/min)
6.6×10-4
For those of you who are looking for a bigger system than our products,
please check the product of ULVAC, Inc..

Copyright (C) 2003 ULVAC KIKO, Inc. All Right Reserved. Ver.4.00 (December 2011)
· The dimensions and specifications of the products listed in this site are subject to change without prior notice for improvement of their performance.