High Vacuum Pumping System

DEPOX Series

VFR-200M/X

Outline

It is the small high vacuum pumping system which stored compactly required apparatus, such as a main pump, backing pump, valve piping, an electric system, and a pressure measurement port, in the mount

Features and Cautions on use

  • The vacuum chamber can be opened without stopping the main pump.
  • Maintenance is easy, because it is made of few parts included a three way valve.
  • Improved system scalability by using new rack which can install optional items such as vacuum gauge.
  • Cooling water of an oil diffusion pump is unnecessary because of an air cooling type.
  • It is easily moving vacuum pumping system with casters.
  • The safety of the installation can be secured with adjusters.

Specification

Pumping speed unit

Pressure unit

Item Unit 50Hz 60Hz
Ultimate Pressure Pa 10-4
Ultimate Pressure (with LN cold trap) Pa 10-5
Weight kg 120
Inlet, Outlet port diameter mm VG-65
Ambient temperature 7~30
Overall dimensions mm 730(W) × 584(L) × 804(H)
RoHS applied

Outline Drawing

Remarks

  • Ionization vacuum gauge · Pirani vacuum gauge · LN cold trap · Conversion flange · Oil mist trap are options.

Applied optional part items

No. Category name Series Name
1 Vacuum Pump Oil DPF Series SX 100cc
2 In-line Trap OMI Series OMI-100
3 Oil-mist Trap OMT Series OMT-100A
4 Parts for Vacuum Piping Flange with hose port pipe (VF65×dia.18)
5 Parts for Vacuum Piping Flange with hose port pipe (VF65×dia.27)
6 Parts for Vacuum Piping Flange with hose port pipe (VF65×dia.30)
7 Parts for Vacuum Piping Flange with KF flange (VF65×KF25)
8 Parts for Vacuum Piping Flange with KF flange (VF65×KF40)

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