Sputtering System

SCOTT/RFS Series

RFS-201

Outline

Small-sized high-frequency sputtering device with an RF power supply. Ideal for basic research and development experiments because of the deposition capabilities for metals, semiconductors and insulat

Features and Cautions on use

  • It is sputtering system of an insulator, metal, and a semiconducting material.
  • Oil diffusion pump is used for main pumping.
  • Single deposition is available by dia.80 mm, 1 cathode.
  • Sputtering speed 20nm/min. (SiO2) is available by conventional sputtering.

Specification

Pressure unit

Item Unit Figure
Ultimate Pressure Pa 6.6×10-4
kPa -101.3 #1
Evacuation time   6.6×10-3Pa/5min
Vacuum chamber   Metal chamber (200mm(W)×250mm(D)×150mm(H))
Cathode   dia.80mm, 1way
Recommended substrate size   dia.80mm×t1-5mm
Effective area of sputtering   50mm
Sputtering speed mm SiO2, more than 20nm/min at
Film thickness distribution   SiO2, within ±8% at dia.50m
Substrate heating temperature   Max 350℃
Substrate electrode distance   30 – 50mm (Variable)
Main pump   Oil diffusion pump (Water cooling) 150L/sec
Liquid Nitrogen trap   Option
Backing pump   Oil rotary pump 100L/min
Oil-mist trap   OMT-100A
Main valve   Clapper valve
Sub valve   Three way valve
Automatic leak valve   Option
Control   Manual control
RF power supply   Max 300W (0 – 300W variable)
Pirani Vacuum Gauge   G-TRAN
Ionization Vacuum Gauge   Option
Overall dimensions mm 764(W) × 723(L) × 1648(H)
Weight kg 260
RoHS applied  

#1: 単位が[kPa]の到達圧力はゲージ圧表示です。

Utility

Item Unit Figure
Power required (Body)   Single phase (200V)(50/60Hz): 2.8kVA
Ground terminal   A grade (ground resistance/10Ω or less)
Water requirement   5.0L/min (Water temperature : less than 25 degrees
Connection (Power supply) Single phase, 200V   Vinyl cabtyre cable (with R2-5 ring tongue termina
Connection (Ground terminal)   Earth cable (sheet copper) 4m
Connection (water piping)   Tetoron Braided hose (O.D.dia.15mm × I.D.dia.9mm),

Outline Drawing

Remarks

  • Please prepare the cooling water piping

Applied optional part items

No. Category name Series Name
1 Vacuum Coater Optional Parts Automatic Leak Valve for Oil-sealed Rotary Vacuum Automatic leak valve for Oil rotary vacuum pump
2 Vacuum Coater Optional Parts Gas introduction port
3 Vacuum Coater Optional Parts Gauge port set
4 Vacuum Coater Optional Parts Hermetic seal port set
5 Vacuum Coater Optional Parts Liquid Nitrogen trap
6 In-line Trap OMI Series OMI-100
7 Vacuum Coater Optional Parts Substrate Heating Device Substrate heating device SH-650F
8 Vacuum Coater Optional Parts Sealing Flange Set Sealing flange set

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