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Outline
Small-sized high-frequency sputtering device with an RF power supply. Ideal for basic research and development experiments because of the deposition capabilities for metals, semiconductors and insulat
Features and Cautions on use
Specification
Pressure unit
#1: 単位が[kPa]の到達圧力はゲージ圧表示です。
Utility
Outline Drawing
Remarks
Applied optional part items
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