Sputtering System

SCOTT/RFS Series

VTR-151M/SRF

Outline

Small-sized high-frequency sputtering device with an RF power supply. Ideal for basic research and development experiments because of the deposition capabilities for metals, semiconductors and insulat

Features and Cautions on use

  • It is sputtering system of an insulator, metal, and a semiconducting material.
  • Turbo molecular pump is used for main pumping.
  • Multiple deposition is available by dia.2 inch, 3 cathodes.
  • Sputtering speed 30nm/min (SiO2) is available by magnetron sputtering.
  • It has Substrate heating system (350degrees C).

Specification

Pressure unit

Item Unit Figure
Ultimate Pressure Pa 6.6×10-4
kPa -101.3 #1
Evacuation time   6.6×10-3Pa/5min
Vacuum chamber   Metal chamber (dia.310.5mm × 160mm (H))
Cathode   dia.2inch, 3ways
Recommended substrate size   dia.2inch (dia.50.8mm) × t1mm
Effective area of sputtering   25mm
Sputtering speed mm SiO2, more than 30nm/min at
Film thickness distribution   SiO2, within ±10% at dia.25
Substrate heating temperature   Max 350℃
Substrate electrode distance   50mm – 90mm (Variable: Half fixed)
Main pump   Turbo molecular pump 250L/sec
Backing pump   Oil rotary pump 200L/min
Oil-mist trap   OMT-200A
Main valve   Butterfly valve
Sub valve   Three way valve
Automatic leak valve   Option
Control   Manual control
RF power supply   Max 300W (0 – 300W variable)
Pirani Vacuum Gauge   GP-1GRY
Ionization Vacuum Gauge   ISG1/SH2-1
Overall dimensions mm 1081(W) × 853(L) × 1104(H)
Weight kg 400
RoHS applied  

#1: 単位が[kPa]の到達圧力はゲージ圧表示です。

Utility

Item Unit Figure
Power required (Body)   Single phase (200V)(50/60Hz): 3.5kVA
Ground terminal   A grade (ground resistance/10Ω or less)
Water requirement   2.0L/min (Water temperature : less than 25 degrees
Connection (Power supply) Single phase, 200V   Vinyl cabtyre cable (with R3.5-5 ring tongue termi
Connection (Ground terminal)   Earth cable(with R5.5-8 ring tongue terminals) 4m
Connection (water piping)   Tetoron Braided hose (O.D.dia.15mm × I.D.dia.9mm),

Outline Drawing

Remarks

  • Please prepare the cooling water piping

Applied optional part items

No. Category name Series Name
1 Vacuum Coater Optional Parts Automatic Leak Valve for Oil-sealed Rotary Vacuum Automatic leak valve for Oil rotary vacuum pump
2 Vacuum Coater Optional Parts Gas introduction port
3 Vacuum Coater Optional Parts Gauge port set
4 Vacuum Coater Optional Parts Hermetic seal port set
5 Vacuum Coater Optional Parts Adapter KF25 Adapter
6 In-line Trap OMI Series OMI-200
7 Vacuum Coater Optional Parts Substrate Heating Device Substrate heating device for SCOTT-C3 (600 degrees)
8 Vacuum Coater Optional Parts Sealing Flange Set Sealing flange set
9 Vacuum Coater Optional Parts UFC070 Adapter

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