Vacuum Coater

DEPOX Series

VFR-200M/ERH

Outline

Small-sized vacuum evaporation equipment with resistance heating requiring compact storage, such as main pumps, backing pumps, Pirani vacuum gauges, ionization vacuum gauges, valve piping, and electri

Features and Cautions on use

  • Easy viewable through glass belljar and easy maintenance.
  • The vacuum chamber can be opened without stopping the main pump.
  • Since an evaporation power supply and electrode have been added, simultaneous evaporation and multi-layer evaporation (a maximum of four layers) are possible.
  • It is easily moving vacuum pumping system with casters.
  • The safety of the installation can be secured with adjusters.

Specification

Pressure unit

Item Unit Figure
Ultimate Pressure Pa 8.0×10-4
kPa -101.3 #1
Evacuation time   4.0×10-3Pa/15min
Ultimate Pressure (with LN cold trap) Pa 6.0×10-4
kPa -101.3
Evacuation time (with LN cold trap)   3.0×10-3Pa/15min
Vacuum chamber   Glass belljar (dia.300mm × 300mm(H))
Feedthrough collar   12 ports (side 8 / bottom 4)
Recommended substrate size   sq.50mm (sq.140mm)
electrode structure   1 point
electrode structure   SEREM “PSE-150C” 1 set　0-10V 150A (Max)
Main pump   Oil diffusion pump (Air cooling) 200L/sec
Liquid Nitrogen trap   Equipped
Backing pump   Oil rotary pump 100L/min
Oil-mist trap   OMI-100
Main valve   Butterfly valve
Sub valve   Three way valve
Automatic leak valve   Option
Control   Manual control
Pirani Vacuum Gauge   ISG1(WP-01)
Ionization Vacuum Gauge   ISG1(M-34)
Overall dimensions mm 730(W) × 603(L) × 1161(H)
Weight kg 145
Overall dimensions (Power supply) mm 480(W) × 435.3(D) × 149(H)
Weight (Power supply) kg 40
RoHS applied  

#1: 単位が[kPa]の到達圧力はゲージ圧表示です。

Utility

Item Unit Figure
Power required (Body)   Single phase (100)(50/60Hz): 1.4kVA
Power required (Power supply)   Single phase (200) (50/60Hz): 1.5kVA
Ground terminal   D grade (ground resistance/100Ω or less)
Connection (Body) Single phase, 100V   Single phase (100): Vinyl cabtyre cable (with R3.5
Connection (Power supply) Single phase, 200V   Single phase (200): Vinyl cabtyre cable (with R2.0

Outline Drawing

Remarks

  • The values of the maximum board size are shown when film thickness distributions are not taken into account.

Applied optional part items

No. Category name Series Name
1 Vacuum Coater Optional Parts Additional shutter
2 Vacuum Coater Optional Parts Adhesion Shield Plate Adhesion shield plate
3 Vacuum Coater Optional Parts Automatic Leak Valve for Oil-sealed Rotary Vacuum Automatic leak valve for Oil rotary vacuum pump
4 Vacuum Coater Optional Parts Bell jar cover
5 Vacuum Coater Optional Parts Bell jar holder
6 Vacuum Coater Optional Parts Control Rack Control rack
7 Vacuum Coater Optional Parts Deposition Controller CRTM-6000G
8 Vacuum Coater Optional Parts Deposition Controller Deposition Controller CRTM-9200
9 Vacuum Coater Optional Parts Film thickness sensor CRTS-4
10 Vacuum Pump Oil DPF Series SX 100cc
11 Vacuum Coater Optional Parts Electrode Partition Electrode partition
12 Vacuum Coater Optional Parts Elevating device
13 Vacuum Coater Optional Parts Gas introduction port
14 Vacuum Coater Optional Parts Gauge port set
15 Vacuum Coater Optional Parts Hermetic seal port set
16 Vacuum Coater Optional Parts Adapter KF25 Adapter
17 Vacuum Coater Optional Parts Metal bell jar (with water cooling tube)
18 Vacuum Coater Optional Parts Evaporation Electrode Evaporation Electrode SEREM PSE-150C
19 Vacuum Coater Optional Parts Substrate Heating Device Substrate heating device SH-350F
20 Vacuum Coater Optional Parts Substrate Heating Device Substrate heating device SH-650F
21 Vacuum Coater Optional Parts Sample holder A
22 Vacuum Coater Optional Parts Sample holder B
23 Vacuum Coater Optional Parts Sample Holder Sample holder C
24 Vacuum Coater Optional Parts Sample Holder Sample holder Soft A
25 Vacuum Coater Optional Parts Sample Holder Sample holder Soft B
26 Vacuum Coater Optional Parts Sealing Flange Set Sealing flange set
27 Vacuum Coater Optional Parts UFC070 Adapter

Download Service