Vacuum Coater

VTR Series

VTR-060M/ERH

Outline

Low-cost, resistance-heating, small-sized vacuum evaporation system that contains a turbo-molecular pump and backing pump in a compact way. Ideal for experiments such as basic research and development

Features and Cautions on use

  • The tabletop compact size enables space-saving installation.
  • Equipped with a turbo molecular pump.
  • High vacuum evacuation is possible by simple switch operation.
  • It has high expandability and is capable of multilayer film deposition and substrate rotation.
  • Ideal for depositing low melting point metals.

Specification

Pressure unit

Item Unit Figure
Ultimate Pressure Pa 10-4
Evacuation time   4.0×10-3Pa/20min
Vacuum chamber   Glass belljar (dia.236mm × 250mm(H))
Feedthrough collar   7 ports (bottom)
Recommended substrate size   sq.50mm (sq.120mm)
Substrate electrode distance   Max 200mm
electrode structure   1 point
electrode structure   SEREM “PSE-150C” 1 set　0-10V 80A (Max)
Main pump   Turbo molecular pump 60L/sec
Backing pump   Oil rotary pump 20L/min
Oil-mist trap   OMT-050A
Main valve   Option (Butterfly valve)
Sub valve   Option (Three way valve)
Automatic leak valve   Option
Control   Manual control
Deposition Controller   Option (CRTM-6000G1)
Overall dimensions mm 428(W) × 438(L) × 713(H)
Weight kg 50
Overall dimensions (Power supply) mm 480(W) × 435.3(D) × 149(H)
Weight (Power supply) kg 24
RoHS applied  

Utility

Item Unit Figure
Power required (Body)   Single phase (100V)(50/60Hz): 0.65kVA
Power required (Power supply)   Single phase (100V) (50/60Hz): 0.8kVA
Connection (Body) Single phase, 100V   Single phase (100V): Vinyl cabtyre cable (with plu
Connection (Power supply) Single phase, 200V   Single phase (100V): Vinyl cabtyre cable (with Plu

Outline Drawing

Remarks

  • Prepare two outlets with ground.
  • The ultimate pressure with valve piping set is 1.5 × 10 ^ -3Pa.

Applied optional part items

No. Category name Series Name
1 Vacuum Coater Optional Parts Optional parts for VTR-060 Adhesion shield plate
2 Vacuum Coater Optional Parts Optional parts for VTR-060 Automatic leak valve for Oil rotary vacuum pump
3 Vacuum Coater Optional Parts Optional parts for VTR-060 Carbon electrode set
4 Vacuum Coater Optional Parts Deposition Controller CRTM-6000G
5 Vacuum Coater Optional Parts Film thickness sensor CRTS-4
6 Vacuum Coater Optional Parts Optional parts for VTR-060 Electrode partition
7 Vacuum Coater Optional Parts Optional parts for VTR-060 Metal chamber
8 Vacuum Coater Optional Parts Evaporation Electrode Evaporation Electrode SEREM PSE-150C
9 Vacuum Coater Optional Parts Optional parts for VTR-060 Substrate heating device SH-350F
10 Vacuum Coater Optional Parts Optional parts for VTR-060 Substrate heating device SH-650F
11 Vacuum Coater Optional Parts Optional parts for VTR-060 Sample holder
12 Vacuum Coater Optional Parts Optional parts for VTR-060 Substrate rotation mechanisms
13 Vacuum Coater Optional Parts Optional parts for VTR-060 System rack
14 Vacuum Coater Optional Parts Optional parts for VTR-060 Vacuum gauge set
15 Vacuum Coater Optional Parts Optional parts for VTR-060 Valve piping set

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