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Outline
Small-sized vacuum evaporation equipment with resistance heating requiring compact storage, such as main pumps, backing pumps, Pirani vacuum gauges, ionization vacuum gauges, valve piping, and electri
Features and Cautions on use
Specification
Pressure unit
#1: 単位が[kPa]の到達圧力はゲージ圧表示です。
Utility
Outline Drawing
Remarks
Applied optional part items
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