Outline
Small-sized high-frequency sputtering device with an RF power supply. Ideal for basic research and development experiments because of the deposition capabilities for metals, semiconductors and insulat
Features and Cautions on use
Specification
| Item | Unit | Figure |
|---|---|---|
| Ultimate Pressure | Pa | 6.6×10-4 |
| kPa | -101.3 #1 | |
| Evacuation time | 6.6×10-3Pa/5min | |
| Vacuum chamber | Metal chamber (dia.310.5mm × 160mm (H)) | |
| Cathode | dia.2inch, 3ways | |
| Recommended substrate size | dia.2inch (dia.50.8mm) × t1mm | |
| Effective area of sputtering | 25mm | |
| Sputtering speed | mm | SiO2, more than 30nm/min at |
| Film thickness distribution | SiO2, within ±10% at dia.25 | |
| Substrate heating temperature | Max 350℃ | |
| Substrate electrode distance | 50mm – 90mm (Variable: Half fixed) | |
| Main pump | Turbo molecular pump 250L/sec | |
| Backing pump | Oil rotary pump 200L/min | |
| Oil-mist trap | OMT-200A | |
| Main valve | Butterfly valve | |
| Sub valve | Three way valve | |
| Automatic leak valve | Option | |
| Control | Manual control | |
| RF power supply | Max 300W (0 – 300W variable) | |
| Pirani Vacuum Gauge | GP-1GRY | |
| Ionization Vacuum Gauge | ISG1/SH2-1 | |
| Overall dimensions | mm | 1081(W) × 853(L) × 1104(H) |
| Weight | kg | 400 |
| RoHS applied |
#1: 単位が[kPa]の到達圧力はゲージ圧表示です。
Utility
| Item | Unit | Figure |
|---|---|---|
| Power required (Body) | Single phase (200V)(50/60Hz): 3.5kVA | |
| Ground terminal | A grade (ground resistance/10Ω or less) | |
| Water requirement | 2.0L/min (Water temperature : less than 25 degrees | |
| Connection (Power supply) Single phase, 200V | Vinyl cabtyre cable (with R3.5-5 ring tongue termi | |
| Connection (Ground terminal) | Earth cable(with R5.5-8 ring tongue terminals) 4m | |
| Connection (water piping) | Tetoron Braided hose (O.D.dia.15mm × I.D.dia.9mm), |
Outline Drawing
Remarks
Applied optional part items
| No. | Category name | Series | Name |
|---|---|---|---|
| 1 | Vacuum Coater Optional Parts | Automatic Leak Valve for Oil-sealed Rotary Vacuum | Automatic leak valve for Oil rotary vacuum pump |
| 2 | Vacuum Coater Optional Parts | Gas introduction port | |
| 3 | Vacuum Coater Optional Parts | Gauge port set | |
| 4 | Vacuum Coater Optional Parts | Hermetic seal port set | |
| 5 | Vacuum Coater Optional Parts | Adapter | KF25 Adapter |
| 6 | In-line Trap | OMI Series | OMI-200 |
| 7 | Vacuum Coater Optional Parts | Substrate Heating Device | Substrate heating device for SCOTT-C3 (600 degrees) |
| 8 | Vacuum Coater Optional Parts | Sealing Flange Set | Sealing flange set |
| 9 | Vacuum Coater Optional Parts | UFC070 Adapter |
|
アルバック機工株式会社 〒881-0037 宮崎県西都市大字茶臼原291-7 TEL:(0983)42-1411(代) FAX:(0983)42-1422 |