Vacuum Coater

VPC Series

VPC-061

Outline

Small-sized high-vacuum low cost exhaust equipment with resistance heating requiring compact storage, such as main pumps, backing pumps, valve piping, electrical systems and pressure measurement ports

Features and Cautions on use

  • Easy viewable through glass belljar and easy maintenance.
  • The vacuum chamber can be opened without stopping the main pump.
  • Since an evaporation power supply and electrode have been added, simultaneous evaporation and multi-layer evaporation are possible.
  • It is easily moving vacuum pumping system with casters.

Specification

Pressure unit

Item Unit Figure
Ultimate Pressure Pa 1.3×10-3
kPa -101.3 #1
Evacuation time   4.0×10-3Pa/20min
Ultimate Pressure (with LN cold trap) Pa 6.6×10-4
kPa -101.3
Evacuation time (with LN cold trap)   1.3×10-3Pa/20min
Vacuum chamber   Glass belljar (dia.150mm × 200mm(H))
Feedthrough collar   3 ports (bottom 3)
Recommended substrate size   sq.25mm (sq.50mm)
Substrate electrode distance   Max 100mm
electrode structure   1 point
electrode structure   SEREM “PSE-150C” 1 set　0-10V 150A (Max)
Main pump   Oil diffusion pump (air cooling) 50L/sec
Liquid Nitrogen trap   Equipped
Backing pump   Oil rotary pump 20L/min
Oil-mist trap   Option
Main valve   Butterfly valve
Sub valve   Three way valve
Automatic leak valve   ―
Control   Manual control
Pirani Vacuum Gauge   Option
Ionization Vacuum Gauge   Option
Overall dimensions mm 434(W) × 422(L) × 673(H)
Weight kg 28
Overall dimensions (Power supply) mm 480(W) × 435.3(D) × 149(H)
Weight (Power supply) kg 40
RoHS applied  

#1: 単位が[kPa]の到達圧力はゲージ圧表示です。

Utility

Item Unit Figure
Power required (Body)   Single phase (100V)(50/60Hz): 0.63kVA
Power required (Power supply)   Single phase (200V) (50/60Hz): 1.5kVA
Ground terminal   D grade (ground resistance/100Ω or less)
Connection (Body) Single phase, 100V   Single phase (100V): Vinyl cabtyre cable (with plu
Connection (Power supply) Single phase, 200V   Single phase (200V): Vinyl cabtyre cable (R2.0-5 w

Outline Drawing

Remarks

  • The values of the maximum board size are shown when film thickness distributions are not taken into account.

Applied optional part items

No. Category name Series Name
1 Vacuum Coater Optional Parts Adhesion Shield Plate Adhesion shield plate
2 Vacuum Coater Optional Parts Bell jar cover
3 Vacuum Coater Optional Parts Control Rack Control rack
4 Vacuum Pump Oil DPF Series SY 100cc
5 Vacuum Coater Optional Parts Pirani Vacuum Gauge GP-1G
6 Oil-ｍist Trap OMT Series OMT-050A
7 Vacuum Coater Optional Parts Evaporation Electrode Evaporation Electrode SEREM PSE-150C
8 Vacuum Coater Optional Parts Sample holder A
9 Vacuum Coater Optional Parts Sample holder B

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