Vacuum Coater

VPC Series

VPC-1100

Outline

It is a high-speed type vacuum deposition system by the resistance heating formula which stored compactly required apparatus, such as an oil diffusion pump, an oil rotary vacuum pump, Pirani gauge, va

Features and Cautions on use

  • Easy viewable through glass belljar and easy maintenance.
  • The vacuum chamber can be opened without stopping the main pump.
  • Since an evaporation power supply and electrode have been added, simultaneous evaporation and multi-layer evaporation are possible.
  • Deposition of high melting point material is possible when the specifications are changed to EB.
  • It is easily moving vacuum pumping system with casters.
  • The safety of the installation can be secured with adjusters.

Specification

Pressure unit

Item Unit Figure
Ultimate Pressure Pa 4.0×10-4
kPa -101.3 #1
Evacuation time   4.0×10-3Pa/10min
Ultimate Pressure (with LN cold trap) Pa 1.3×10-4
kPa -101.3
Evacuation time (with LN cold trap)   1.0×10-4Pa/10min
Vacuum chamber   Glass belljar (dia.390mm × 350mm(H))
Feedthrough collar   20 ports (side 14 / bottom 6)
Recommended substrate size   sq.50mm (sq.220mm)
electrode structure   3 points
electrode structure   SEREM “PSE-150C” 1 set　0-10V 150A (Max)
Main pump   Oil diffusion pump (Water cooling) 1100L/sec
Liquid Nitrogen trap   Equipped
Backing pump   Oil rotary pump 200L/min ×2
Oil-mist trap   Option
Main valve   Butterfly valve
Sub valve   Three way valve
Automatic leak valve   Option
Control   Manual control
Pirani Vacuum Gauge   GP-1G
Ionization Vacuum Gauge   Option
Overall dimensions mm 1235(W) × 836(L) × 2155(H)
Weight kg 313
Weight (Power supply) kg 313
RoHS applied  

#1: 単位が[kPa]の到達圧力はゲージ圧表示です。

Utility

Item Unit Figure
Power required (Body)   Three phase,200V,5.0kVA Single phase,100V,1.0kVA
Ground terminal   D grade (ground resistance/100Ω or less)
Water requirement   1.5L/min (temp.:20–25deg.,pressure:200-300kPa)
Connection (Body) Single phase, 100V   3P200V:4m(R3.5-4 ring) 1P100V:4m(with plug)
Connection (water piping)   Rp1/4 (With hose fitting
Recommended house   Tetoron Braided hose (O.D.dia.15mm×I.D.dia.9mm)

Outline Drawing

Remarks

  • The values of the maximum board size are shown when film thickness distributions are not taken into account.
  • The specifications can be arranged for a turbo-molecular pump (TMP).
  • Please prepare the cooling water piping

Applied optional part items

No. Category name Series Name
1 Vacuum Coater Optional Parts Additional shutter
2 Vacuum Coater Optional Parts Adhesion Shield Plate Adhesion shield plate
3 Vacuum Coater Optional Parts Automatic Leak Valve for Oil-sealed Rotary Vacuum Automatic leak valve for Oil rotary vacuum pump
4 Vacuum Coater Optional Parts Control Rack Control rack
5 Vacuum Coater Optional Parts Deposition Controller CRTM-6000G
6 Vacuum Coater Optional Parts Deposition Controller Deposition Controller CRTM-9200
7 Vacuum Coater Optional Parts Film thickness sensor CRTS-4
8 Vacuum Coater Optional Parts Electrode Partition Electrode partition
9 Vacuum Coater Optional Parts Gas introduction port
10 Vacuum Coater Optional Parts Gauge port set
11 Vacuum Coater Optional Parts Hermetic seal port set
12 Vacuum Coater Optional Parts Adapter KF25 Adapter
13 Vacuum Coater Optional Parts Metal bell jar (with water cooling tube)
14 Vacuum Coater Optional Parts Evaporation Electrode Evaporation Electrode SEREM PSE-150C
15 Vacuum Coater Optional Parts Substrate Heating Device Substrate heating device SH-350F
16 Vacuum Coater Optional Parts Substrate Heating Device Substrate heating device SH-650F
17 Vacuum Coater Optional Parts Sample holder A
18 Vacuum Coater Optional Parts Sample holder B
19 Vacuum Coater Optional Parts Sample Holder Sample holder C
20 Vacuum Coater Optional Parts Sample Holder Sample holder Soft A
21 Vacuum Coater Optional Parts Sample Holder Sample holder Soft B
22 Vacuum Coater Optional Parts Sealing Flange Set Sealing flange set
23 Vacuum Coater Optional Parts System Rack System rack
24 Vacuum Coater Optional Parts UFC070 Adapter

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