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No. Image Series Name/Model Main pump Backing pump
1 SCOTT/RFS Series RFS-201 Oil diffusion pump (Water cooling) 150L/sec Oil rotary pump 100L/min
2 SCOTT/RFS Series VTR-151M/SRF Turbo molecular pump 250L/sec Oil rotary pump 200L/min
3 DEPOX Series VFR-200M/ERH Oil diffusion pump (Air cooling) 200L/sec Oil rotary pump 100L/min
4 VPC Series VPC-061 Oil diffusion pump (air cooling) 50L/sec Oil rotary pump 20L/min
5 VPC Series VPC-1100 Oil diffusion pump (Water cooling) 1100L/sec Oil rotary pump 200L/min ×2
6 VPC Series VPC-260F Oil diffusion pump (air cooling) 200L/sec Oil rotary pump 100L/min
7 VTR Series VTR-060M/ERH Turbo molecular pump 60L/sec Oil rotary pump 20L/min
8 DEPOX Series VTR-350M/ERH Turbo molecular pump 345L/sec Oil rotary pump 200L/min
9 DEPOX Series VTS-350M/ERH Turbo molecular pump 345L/sec Scroll pump 250L/min
10 DEPOX Series VWR-400M/ERH Oil diffusion pump (Water cooling) 400L/sec Oil rotary pump 200L/min

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