Category Sub Category Series Name/Model Pumping Speed(L/min.) Ultimate Pressure(Pa)
50Hz 60Hz
Vacuum Pump Diaphragm type Vacuum Pumps DA(P/T/L) Series DAP-6D 6 7 6.65×103
DAP-9D-DC24 9 9 6.65×103
DAP-12S 12 14 24.0×103
DAP-18S-DC24 18 18 24.0×103
DA-20D 20 24 5.33×103
DA-30D 30 36 6.7×103
DA-40S 40 46 19.9×103
DA-41D 40 46 3.3×103
DA-41DK 40 46 3.3×103
DAT-50D 50 55 3.3×103
DA-60D 60 72 3.32×103
DA-60S 60 72 21.3×103
DA-81S 75 85 13.3×103
DA-81SK 75 85 13.3×103
DAT-100S 100 110 13.3×103
DA-120S 120 144 13.3×103
DA-121D 120 145 3.3×103
DAL-181D 180 210 3.3×103
DA-241S 240 260 16.0×103
DAL-361S 360 390 17.3×103
DAU/MD Series DAU-20 20 23 200
DAU-100 100 110 266
MD4UNT 60 70 100
DTC Series DTC-22 20 24 1.0×103
DTC-22K 20 24 1.0×103
DTC-41 40 46 1.0×103
DTC-41K 40 46 1.0×103
DTC-60 60 70 1.0×103
DTC-120 120 140 1.0×103
DTU/MD Series DTU-20 20 23 200
MD4UCNT 50 60 150
Scroll Type Vacuum Pumps DIS Series DIS-90 90 108 5
DIS-251 250 300 1.6
DIS-501 500 600 1
DISL Series DISL-102 100 120 20
DISL-503 433 516 30
Rocking Piston Type Vacuum Pumps DOP Series DOP-40D 40 44 1.2×103
DOP-80S 80 88 5.33×103
DOP-120SY 120 140 8.0×103
DOP-181S 180 200 10.0×103
DOP-301SB 300 330 8.0×103
DOP-400SB 400 440 12.0×103
DOP-420SA 420 460 17.3×103
Oil Diffusion Pump DPF Series DPF-050 1.0×10-5
DPF-200 1.0×10-5
Oil-Sealed Rotary Vacuum Pumps G Series G-101D 100 120 0.67
GHD Series GHD-031 30 36 0.67
GHD-101 100 120 0.67
GLS/GLD Series GLD-040 40 48 0.67
GLS-051 50 60 9.3
GLD-137AA 135 162 0.67
GLD-137CC 135 162 0.67
GLD-202AA 200 240 0.67
GLD-202BB 200 240 0.67
GLD-280A 280 336 0.67
GCD Series GCD-051X 50 60 0.67
GCD-136X 135 162 0.67
GCD-201X 200 240 0.67
Multi-Stage Roots Type Vacuum Pumps RDA Series RDA-281HA 280 280 ≦8.0×10-2(FA close)
RDA-501HA 500 500 ≦8.0×10-2(FA close)
Mechanical Booster Pump MBS Series MBS-053 833 833 4.0×10-2
Portable Aspirator MDA Series MDA-015A 12 15 6.6×103
High Vacuum Pumping System DEPOX Series VFR-200M/X 1.0×10-4
VTR-350M/X 1.0×10-4
VTS-350M/X 1.0×10-4
VWR-400M/X 1.0×10-4
VPC Series VPC-051 7.0×10-4
VPC-250F 1.0×10-4
Mechanical Booster Pumping System VM Series VMR-050 4.0×10-2
Pressure Pump Pressure Pump DOP Series DOP-80SP 80 84 5.0×105
Deposition system Vacuum Coater DEPOX Series VFR-200M/ERH 8.0×10-4
VTR-350M/ERH 4.0×10-4
VTS-350M/ERH 4.0×10-4
VWR-400M/ERH 4.0×10-4
VPC Series VPC-061 1.3×10-3
VPC-1100 4.0×10-4
VPC-260F 4.0×10-3
VTR Series VTR-060M/ERH 1.0×10-4
Sputtering System SCOTT/RFS Series RFS-201 6.6×10-4
SCOTT-C3 6.6×10-4

Download Service