What is diaphragm type dry vacuum pump？

A diaphragm type dry vacuum pump is a vacuum pump that exhausts gas using the reciprocating motion of the diaphragm. With the recent rapid development of the semiconductor manufacturing industry and the electronics equipment industry, demand for the diaphragm type dry vacuum pump has also been increasing.

Features of Diaphragm Type Dry Vacuum Pumps

A diaphragm type dry vacuum pump is a mechanical vacuum pump that does not use oil or liquid. Especially, it is not contaminated by oil vapor. This pump is ideal for applications that require a clean atmosphere.
Strength: The pump does use oil, which allows clean exhaust.
Weakness: The pump can not obtain a high vacuum.

Applications

Vacuum pumping, vacuum concentration, filtration, degassing and defoaming, vacuum chuck, film suction, packaging machines, optical machines, vacuum tweezers, medical equipment, printing machines.

Mechanism of Diaphragm Type Dry Vacuum Pumps

Gas transport by simple structure.

Rotation of the eccentric axis (rotor) transfers power to the diaphragm through the connecting rod. The diaphragm moves up and down repeatedly to transport gas from the inlet port to the exhaust port, which allows clean exhaust. Also, valves are installed at each port to allow air to flow in the same direction constantly.

　Movie：Exhaust Principle