What is Multi-stage roots type dry vacuum pumps？

A dry pump is a mechanical vacuum pump that does not use oil or liquid in a vacuum chamber.

Features of Multi-stage roots type dry vacuum pumps

Roots type dry vacuum pump is a dry vacuum pump which is integrated with a multi-stage mechanical booster pump. Roots type dry vacuum pump with a three-leaf-shaped rotor can compress and exhaust to atmospheric pressure by connecting a multi-stage rotor to a single shaft.

Strength: This pump obtains a clean vacuum and can be used from atmospheric pressure to ultimate pressure.
Weakness: Large size for pumping speed.

Applications

FPD manufacturing equipment, semiconductor manufacturing equipment, vacuum distillation, purification degassing, sterilization, drying, dehydration, disinfection.

Mechanism of Multi-stage roots type dry vacuum pumps

Gas transportation by a high-speed rotor.

The pump has two three-leaf-shaped rotors (rotating body) in a box called casing. A pair of gears rotate in opposite directions at the same cycle. Rotors do not contact with each other, and the rotor and casing do not contact with each other. They rotate to transfer and compress gas while maintaining a small gap. The rotor has a multi-stage structure and compresses to atmospheric pressure, and then pump it into the atmosphere.